SYS-CON MEDIA Authors: Liz McMillan, Sean Houghton, Glenn Rossman, Ignacio M. Llorente, Xenia von Wedel

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Gigaphoton Has Introduced "Green Innovations" to Arf Immersion Lasers

Gigaphoton Inc., a major lithography light source manufacturer, announced today that major semiconductor manufacturers highly value its leading-edge “Green Innovations” environmental technologies, introduced to Gigaphoton’s flagship “GT Series” of ArF immersion lasers.

Since its establishment in 2000, Gigaphoton has consistently focused on achieving the highest levels of output power, performance, and stability in the industry, as well as implementing technologies and design principles that deliver the higher efficiency required for environmentally conscious “green fab.” These efforts have been proven in the field over time, with Gigaphoton’s GT Series customers having received the benefits of significantly lower power consumption and lower gas consumption.

In recent years, the conservation of natural resources has been demanded on a global scale from an environmental-conscious viewpoint. For over 14 years, we at Gigaphoton have been implementing ”Green Innovations” for its high-performance lasers. Furthermore, Gigaphoton started its EcoPhoton™ program in 2003, and since then has been aggressively working on achieving higher efficiency as well as minimizing the consumption of gases, water, power, and other resources.

Gigaphoton’s GT Series lasers have evolved its environmentally conscious “green technologies” based on this EcoPhoton™ program. The injection lock technology used by the GT Series lasers enables the delivery of higher output, higher performance, and higher stability at extremely high efficiency. It has enabled a reduction of power consumption by half compared with the conventional single-chamber technology. Gigaphoton will continue to promote the EcoPhoton™ program with the aim of reducing power consumption by 50% and gas consumption by 75% by 2019 compared with 2014 levels.

“I am very pleased and grateful that our Green Innovations have been so highly valued by our customers,” said Hitoshi Tomaru, President and CEO of Gigaphoton Inc. “We are committed to proceeding with our EcoPhoton™ program to make further contributions to the semiconductor industry.”

About the EcoPhoton™ Program

The EcoPhoton™ program is a roadmap started in 2003 to implement Green Innovations, focusing on detailed analyses of three key cost-of-ownership (CoO) metrics: cost of consumables (CoC), cost of downtime (CoD), and cost of environment (CoE). The program aims at achieving continuous reduction of these costs by developing innovative green technologies.

About Gigaphoton

Since it was founded in 2000, Gigaphoton has developed and delivered user-friendly, high-performance DUV laser light sources used by major semiconductor chipmakers in the Pan-Asian, US and European regions.

Gigaphoton leads the way with cost-effective, highly productive lithography sources for high-volume production. With a global business outlook, Gigaphoton strives to be the world’s number-one lithography light source provider, focusing on end-user needs in every phase of its business — from research and development to manufacturing, to best-in-class reliability and world-class customer support. For more information, please visit www.gigaphoton.com/?lang=en.

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